Transient processes in thin film bulk acoustic wave piezoelectric resonators

被引：1
|
作者：
Yang, Guangying [1 ]
Du, Jianke [1 ]
Wang, Ji [1 ]
Yang, Jiashi [1 ,2 ]
机构：
[1] Ningbo Univ, Sch Mech Engn & Mech, Piezoelect Device Lab, Ningbo, Zhejiang, Peoples R China
[2] Univ Nebraska, Dept Mech & Mat Engn, Lincoln, NE USA
来源：
FERROELECTRICS LETTERS SECTION | 2017年 / 44卷 / 4-6期
基金：
中国国家自然科学基金;
关键词：
THICKNESS-SHEAR VIBRATIONS; PLATE;
D O I：
10.1080/07315171.2017.1397446
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
We studied electrically forced, transient thickness-extensional vibration of piezoelectric plates of crystals of class 6mm as thin film bulk acoustic wave resonators. A generalized Fourier series solution was obtained and verified by comparison with finite element numerical analysis. The transient processes of the startup or shutting down of a resonator was examined. It was found that for a typical thin film resonator of ZnO or AlN with a 2 mu m thickness, a fundamental thickness-extensional frequency of 1-2GHz, and a damping described by a material quality factor of 10(5), the characteristic startup time from rest to time-harmonic motion is about 0.1millisecond.
引用
收藏
页码：93 / 100
页数：8
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