The effect of a GaN nucleation layer on GaN film properties grown by metalorganic chemical vapor deposition

被引:0
|
作者
VanderStricht, W [1 ]
Moerman, I [1 ]
Demeester, P [1 ]
Crawley, JA [1 ]
Thrush, EJ [1 ]
Middleton, PG [1 ]
Cowan, CT [1 ]
ODonnell, KP [1 ]
机构
[1] STATE UNIV GHENT,IMEC,DEPT INFORMAT TECHNOL,B-9000 GHENT,BELGIUM
来源
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:231 / 236
页数:6
相关论文
共 50 条
  • [31] Isoelectronic In-doping effect in GaN films grown by metalorganic chemical vapor deposition
    Shu, CK
    Ou, J
    Lin, HC
    Chen, WK
    Lee, MC
    APPLIED PHYSICS LETTERS, 1998, 73 (05) : 641 - 643
  • [32] Influence of buffer layer and growth temperature on the properties of an undoped GaN layer grown on sapphire substrate by metalorganic chemical vapor deposition
    Wang, T
    Shirahama, T
    Sun, HB
    Wang, HX
    Bai, J
    Sakai, S
    Misawa, H
    APPLIED PHYSICS LETTERS, 2000, 76 (16) : 2220 - 2222
  • [33] Influence of a SiN mask on GaN layer by metalorganic chemical vapor deposition
    Kim, Deok Kyu
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2008, 19 (05) : 471 - 475
  • [34] In situ normal incidence reflectance study on the effect of growth rate of nucleation layer on GaN by metalorganic chemical vapor deposition
    Kim, DJ
    Moon, YT
    Ahn, KS
    Park, SJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (01): : 140 - 143
  • [35] Influence of a SiN mask on GaN layer by metalorganic chemical vapor deposition
    Deok Kyu Kim
    Journal of Materials Science: Materials in Electronics, 2008, 19 : 471 - 475
  • [36] Effect of dislocations on luminescence properties of silicon-doped GaN grown by metalorganic chemical vapor deposition method
    Alam, J
    Bathe, R
    Vispute, RD
    Zavada, JM
    Litton, CW
    Iliadis, AA
    Mohammad, SN
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (02): : 624 - 629
  • [37] Properties of ZnO(0001) layers grown by metalorganic chemical vapor deposition on GaN(0001) templates
    Ive, T.
    Ben-Yaacov, T.
    Asamizu, H.
    Van de Walle, C. G.
    Mishra, U.
    DenBaars, S. P.
    Speck, J. S.
    PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 5, NO 6, 2008, 5 (06): : 1733 - +
  • [38] Properties of GaN epitaxial layers grown at high growth rates by metalorganic chemical vapor deposition
    Y. Kokubun
    J. Nishio
    M. Abe
    T. Ehara
    S. Nakagomi
    Journal of Electronic Materials, 2001, 30 : 23 - 26
  • [39] Structural and Optical Properties of ZnO Nanotips Grown on GaN Using Metalorganic Chemical Vapor Deposition
    J. Zhong
    G. Saraf
    H. Chen
    Y. Lu
    Hock M. Ng
    T. Siegrist
    A. Parekh
    D. Lee
    E. A. Armour
    Journal of Electronic Materials, 2007, 36 : 654 - 658
  • [40] Structural and optical properties of GaN1-xAsx grown by metalorganic chemical vapor deposition
    Tsuda, Y
    Mouri, H
    Yuasa, T
    Taneya, M
    APPLIED PHYSICS LETTERS, 2004, 85 (19) : 4361 - 4363