Nanomilling surfaces using near-threshold femtosecond laser pulses

被引：10
|
作者：
Kirkwood, S. E. [1 ]
Taschuk, M. T. [1 ]
Tsui, Y. Y. [1 ]
Fedosejevs, R. [1 ]
机构：
[1] Univ Alberta, Dept Elect & Comp Engn, Edmonton, AB T6G 2V4, Canada
来源：
COLA'05: 8TH INTERNATIONAL CONFERENCE ON LASER ABLATION | 2007年 / 59卷
基金：
加拿大自然科学与工程研究理事会;
关键词：
D O I：
10.1088/1742-6596/59/1/126
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We have produced crater depths of less than 10 nanometers using 100-1000 pulses of a near-infrared femtosecond laser (800 rim, 125 fs) on a copper thin film surface. By determining the single-shot ablation threshold, incubation coefficient and surface reflectivity, the femtosecond laser pulse parameters for surface nanomilling are established close to the multiple-pulse ablation threshold limit for a copper thin film. Photomultiplier measurements of a copper emission line were used as a real time monitor of the nanomilling process for which photons were detected only once every several shots. The results are consistent with a model that ablation occurs in bursts every several shots after a. number of intervening incubation energy storage shots.
引用
收藏
页码：591 / +
页数：2
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