Nanomilling surfaces using near-threshold femtosecond laser pulses

被引：10

作者：

Kirkwood, S. E. ^{[1
]}

Taschuk, M. T. ^{[1
]}

Tsui, Y. Y. ^{[1
]}

Fedosejevs, R. ^{[1
]}

机构：

[1] Univ Alberta, Dept Elect & Comp Engn, Edmonton, AB T6G 2V4, Canada

来源：

COLA'05: 8TH INTERNATIONAL CONFERENCE ON LASER ABLATION | 2007年 / 59卷

基金：

加拿大自然科学与工程研究理事会;

关键词：

D O I：

10.1088/1742-6596/59/1/126

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We have produced crater depths of less than 10 nanometers using 100-1000 pulses of a near-infrared femtosecond laser (800 rim, 125 fs) on a copper thin film surface. By determining the single-shot ablation threshold, incubation coefficient and surface reflectivity, the femtosecond laser pulse parameters for surface nanomilling are established close to the multiple-pulse ablation threshold limit for a copper thin film. Photomultiplier measurements of a copper emission line were used as a real time monitor of the nanomilling process for which photons were detected only once every several shots. The results are consistent with a model that ablation occurs in bursts every several shots after a. number of intervening incubation energy storage shots.

引用

页码：591 / +

页数：2

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