Synthesis and characterization of tungsten Imido/Aminoalkoxide complexes to deposit tungsten oxide thin films

Novel tungsten complexes containing aminoalkoxide ligands were synthesized in solid phase (W((NBu)-Bu-t)(2)(dmamp)(2), 1) and liquid phase (W((NBu)-Bu-t)(2)(dmamb)(2), 2) that were prepared through the metathesis reaction of W((NBu)-Bu-t)(2)Cl-2(py)(2) with 2 equiv. of Na(dmamp) and Na(dmamb), respectively. The compounds 1 and 2 were characterized by IR, MS, H-1 and C-13 NMR spectroscopies, and microanalyses. The molecular structure of 1 shows distorted trigonal bipyramidal geometry by single-crystal X-ray diffraction study. Thermogravimetric analyses of 1 and 2 showed two step weight loss and the residues was expected to be WO2. Thermally decomposed material of 1 under nitrogen atmosphere conforms to WO2 by XRD.