Long-range effect in metals in ion implantation

The long-range effect in metals and alloys in ion implantation is considered. As an illustration, the dislocational structures formed in copper in high-dose ion implantation are studied electron microscopically. The magnitude of the long-range effect is determined by the initial microstructure of the target and the structural-phase state formed in the alloyed surface layer. A mathematical model of defect-structure formation in the sublayer directly beneath the alloyed surface layer of the target is proposed. Calculations by the model proposed prove consistent with experiment.