Non-destructive study of the ion-implantation-affected zone (the long-range effect) in titanium nitride

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[1] Perry, Anthony J.
[2] Treglio, James R.
[3] Schaffer, James P.
[4] Brunner, Jean
[5] Valvoda, Vaclav
[6] Rafaja, David
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Perry, Anthony J. | 1600年 / Elsevier Sequoia SA, Lausanne, Switzerland卷 / 66期
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Ion implantation;
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