Long-range effect in metals in ion implantation

被引：0
|
作者：
Sharkeev, YP
Kolupaeva, SN
Girsova, NV
Vikhor, NA
Fortuna, SV
Popov, LE
Kozlov, EV
机构：
来源：
RUSSIAN METALLURGY | 1998年 / 01期
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暂无
中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
The long-range effect in metals and alloys in ion implantation is considered. As an illustration, the dislocational structures formed in copper in high-dose ion implantation are studied electron microscopically. The magnitude of the long-range effect is determined by the initial microstructure of the target and the structural-phase state formed in the alloyed surface layer. A mathematical model of defect-structure formation in the sublayer directly beneath the alloyed surface layer of the target is proposed. Calculations by the model proposed prove consistent with experiment.
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页码：132 / 140
页数：9
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