INTERFEROMETRIC VIBRATION DISPLACEMENT MEASUREMENT

被引：0
|
作者：
Garoi, F. [1 ]
Logofatu, P. C. [1 ]
Apostol, D. [1 ]
Udrea, C. [1 ]
Schiopu, P. [2 ]
机构：
[1] Natl Inst Lasers Plasma & Radiat Phys, Magurele 077125, Romania
[2] Univ Politehn Bucuresti, Dept Optoelect, Bucharest 061071, Romania
来源：
ROMANIAN REPORTS IN PHYSICS | 2010年 / 62卷 / 03期
关键词：
interferometry; displacement measurement; vibration analysis; metrology; LASER INTERFEROMETRY; PICK-UPS; CALIBRATION;
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
An interferometric method for measuring vibration displacement and acceleration in the 800 Hz - 10 kHz frequency range is described and experimentally tested. Our experimental setup is based on the Twyman-Green interferometer and we were able to measure vibration displacements of 0.12 and 0.27 mu m. Depending on frequency, accelerations in the range 1.52 - 10.75 m/s(2) were obtained.
引用
收藏
页码：671 / 677
页数：7
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