INTERFEROMETRIC VIBRATION DISPLACEMENT MEASUREMENT

被引：0

作者：

Garoi, F. ^{[1
]}

Logofatu, P. C. ^{[1
]}

Apostol, D. ^{[1
]}

Udrea, C. ^{[1
]}

Schiopu, P. ^{[2
]}

机构：

[1] Natl Inst Lasers Plasma & Radiat Phys, Magurele 077125, Romania

[2] Univ Politehn Bucuresti, Dept Optoelect, Bucharest 061071, Romania

来源：

ROMANIAN REPORTS IN PHYSICS | 2010年 / 62卷 / 03期

关键词：

interferometry; displacement measurement; vibration analysis; metrology; LASER INTERFEROMETRY; PICK-UPS; CALIBRATION;

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

An interferometric method for measuring vibration displacement and acceleration in the 800 Hz - 10 kHz frequency range is described and experimentally tested. Our experimental setup is based on the Twyman-Green interferometer and we were able to measure vibration displacements of 0.12 and 0.27 mu m. Depending on frequency, accelerations in the range 1.52 - 10.75 m/s(2) were obtained.

引用

页码：671 / 677

页数：7

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