Design and simulation of vertically-stacked nanowire transistors at 3 nm technology nodes

被引：10

作者：

Dey, S. ^{[1
]}

Jena, J. ^{[1
]}

Mohapatra, E. ^{[1
]}

Dash, T. P. ^{[1
]}

Das, S. ^{[2
]}

Maiti, C. K. ^{[1
]}

机构：

[1] Siksha O Anusandhan Deemed Be Univ, Dept Elect & Commun Engn, Bhubaneswar 75030, Odisha, India

[2] Silicon Inst Technol, Dept Elect & Commun Engn, Bhubaneswar 75104, Odisha, India

来源：

PHYSICA SCRIPTA | 2020年 / 95卷 / 01期

关键词：

vertically-stacked nanowire FETs; quantum confinement; technology computer aided design (TCAD); density-gradient (DG) model; metal grain granularity (MGG);

D O I：

10.1088/1402-4896/ab4621

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Gate-all-around (GAA) cylindrical Si channel nanowire field-effect transistor (NW-FET) devices have the potential to replace FinFETs in future technology nodes because of their better channel electrostatics control. In this work, 3D TCAD physics-based simulations are performed for the first time to evaluate the potential of NW-FETs at extreme scaling limits of 3 nm using quantum corrected 3D density gradient finite element simulations. Simulations are also performed to study the effects of process-induced variabilities, such as metal grain granularity (MGG) on 3 nm gate length device performance in the sub-threshold region. The importance of MGG induced variability for gate-all-around stacked devices having 3 horizontal nanowires in the 3 nm technology nodes is shown.

引用

页数：9

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