Phase transition behaviors and thermal conductivity measurements of nitrogen-doped Sb2Te3 thin films

Crystallization temperature of nitrogen-doped Sb2Te3 (ST) thin films increased with increasing nitrogen doping concentration, which indicates that the long-term stability of the metastable amorphous state can be improved by nitrogen doping. The root-mean-square (rms) roughness values of the films showed a significant decrease with nitrogen doping. Thermal conductivity of nitrogen-doped ST thin films was measured using a transient thermoreflectance (TTR) technique. It was found that the thermal conductivity decreased with increasing nitrogen doping concentration and increased with increasing annealing temperature. Nitrogen-doped ST thin films are suitable phase-change materials for low programming power consumption applications of phase-change random access memory (PCRAM). (C) 2010 Elsevier B.V. All rights reserved.