Extreme ultraviolet source at 6.7 nm based on a low-density plasma

被引：57

作者：

Higashiguchi, Takeshi ^{[1
,2
,3
]}

Otsuka, Takamitsu ^{[1
,2
]}

Yugami, Noboru ^{[1
,2
,3
]}

Jiang, Weihua ^{[4
]}

Endo, Akira ^{[5
]}

Li, Bowen ^{[6
]}

Kilbane, Deirdre ^{[6
]}

Dunne, Padraig ^{[6
]}

O'Sullivan, Gerry ^{[6
]}

机构：

[1] Utsunomiya Univ, Dept Adv Interdisciplinary Sci, CORE, Utsunomiya, Tochigi 3218585, Japan

[2] Utsunomiya Univ, Opt Technol Innovat Ctr OpTIC, Utsunomiya, Tochigi 3218585, Japan

[3] CREST, Japan Sci & Technol Agcy, Kawaguchi, Saitama 3320012, Japan

[4] Nagaoka Univ Technol, Dept Elect Engn, Nagaoka, Niigata 9402188, Japan

[5] Waseda Univ, Res Inst Sci & Engn, Shinjuku Ku, Tokyo 1698555, Japan

[6] Univ Coll Dublin, Sch Phys, Dublin 4, Ireland

来源：

APPLIED PHYSICS LETTERS | 2011年 / 99卷 / 19期

基金：

爱尔兰科学基金会;

关键词：

LITHOGRAPHY LITHOGRAPHY; EMISSION;

D O I：

10.1063/1.3660275

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We demonstrate an efficient extreme ultraviolet (EUV) source for operation at lambda = 6.7 nm by optimizing the optical thickness of gadolinium (Gd) plasmas. Using low initial density Gd targets and dual laser pulse irradiation, we observed a maximum EUV conversion efficiency (CE) of 0.54% for 0.6% bandwidth (BW) (1.8% for 2% BW), which is 1.6 times larger than the 0.33% (0.6% BW) CE produced from a solid density target. Enhancement of the EUV CE by use of a low-density plasma is attributed to the reduction of self-absorption effects. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3660275]

引用

页数：3

共 50 条

[31] Development of a plasma laser source for lithography in extreme ultraviolet
Soullié, G
Lafon, C
Rosch, R
Babonneau, D
Garaude, F
Huelvan, S
Trublet, T
Bonnet, L
Marmoret, R
JOURNAL DE PHYSIQUE IV, 2003, 108 : 275 - 279
[32] Extreme ultraviolet spectroscopy of a laser plasma source for lithography
Shevelko, AP
Shmaenok, LA
Churilov, SS
Bastiaensen, RKFJ
Bijkerk, F
PHYSICA SCRIPTA, 1998, 57 (02): : 276 - 282
[33] Ionization Transition in Low-Density Plasma
Triger, S. A.
Khomkin, A. L.
Shumikhin, A. S.
PLASMA PHYSICS REPORTS, 2011, 37 (09) : 816 - 822
[34] MIXING IN PLASMA AND LOW-DENSITY JETS
RUSS, S
STRYKOWSKI, PJ
PFENDER, E
EXPERIMENTS IN FLUIDS, 1994, 16 (05) : 297 - 307
[35] ATHEROSCLEROSIS AND THE LOW-DENSITY LIPOPROTEINS OF PLASMA
FAERGEMAN, O
SCANDINAVIAN JOURNAL OF HAEMATOLOGY, 1979, : 116 - 118
[36] LOW-DENSITY ROTATING PLASMA IN A MIRROR
KONSTANTINOV, SG
TSELNIK, FA
SOROKIN, AF
MYSKIN, OK
SOVIET PHYSICS TECHNICAL PHYSICS-USSR, 1972, 16 (12): : 2006 - +
[37] Ionization transition in low-density plasma
S. A. Triger
A. L. Khomkin
A. S. Shumikhin
Plasma Physics Reports, 2011, 37 : 816 - 822
[38] RADIATIVE COOLING OF A LOW-DENSITY PLASMA
COX, DP
DALTABUIT, E
ASTROPHYSICAL JOURNAL, 1971, 167 (01): : 113 - +
[39] LOW-DENSITY PLASMA IN AN ELECTRIC FIELD
GUREVICH, AV
DNESTROV.YN
KOSTOMAR.DP
GLUKHIKH, EA
SOVIET PHYSICS TECHNICAL PHYSICS-USSR, 1971, 16 (03): : 443 - &
[40] IMMUNOASSAY OF PLASMA LOW-DENSITY LIPOPROTEINS
LEES, RS
SCIENCE, 1970, 169 (3944) : 493 - &

← 1 2 3 4 5 →