共 50 条
- [11] Mid-infrared Aluminium Nitride Waveguides for Label-Free Sensing 2017 IEEE 17TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO), 2017, : 768 - 770
- [13] Decorrelation of optical critical dimensions in mid-infrared ellipsometric spectroscopy of high aspect ratio etch profiles JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, 2022, 21 (02):
- [14] Mid-infrared supercontinuum generation in high-contrast, fusion-bonded silicon membrane waveguides 30TH ANNUAL CONFERENCE OF THE IEEE PHOTONICS SOCIETY (IPC), 2017, : 313 - 314
- [17] Additive-free electroplating of copper in high-aspect-ratio trenches PROCEEDINGS OF THE IEEE 2001 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, 2001, : 27 - 29