Epitaxial growth and optical properties of Er-doped CeO2 on Si(111)

被引:9
|
作者
Inaba, Tomohiro [1 ]
Tawara, Takehiko [1 ,2 ]
Omi, Hiroo [1 ,2 ]
Yamamoto, Hideki [1 ]
Gotoh, Hideki [1 ]
机构
[1] NTT Corp, NTT Basic Res Labs, Atsugi, Kanagawa 2430198, Japan
[2] NTT Corp, NTT Nanophoton Ctr, Atsugi, Kanagawa 2430198, Japan
来源
OPTICAL MATERIALS EXPRESS | 2018年 / 8卷 / 09期
关键词
GATE DIELECTRICS; HIGH-K; CERIUM; NANOCOMPOSITE; SILICON; LAYERS; FILMS;
D O I
10.1364/OME.8.002843
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Epitaxial growth of erbium-doped cerium oxide (Er:CeO2) is achieved on Si (111) substrates by the cooperative integration of Si and oxide molecular beam epitaxy (MBE) technologies. Lattice matching between CeO2 and Si provides an attractive opportunity to build dilutely doped Er-based optical devices on a Si chip. The CeO2 host crystal is optically transparent for the telecom C-band wavelength and has quite a small magnetic moment, which serves as a disturbance-free environment for the two-level system formed in the doped Er. After the systematic optimization of the growth conditions for stoichiometric Er:CeO2; i.e., (Er + Ce)/O = 1/2, we varied the Er concentration in a range of 1 similar to 4%. The doped Er showed well-defined optical transitions at the wavelength of 1.533 mu m irrespective of the Er concentration. With decreasing Er concentration, enhancement of the luminescence intensity, narrowing of the spectral width, and an increase in the radiative lifetime were observed. The results suggest that CeO2 on Si is promising as a platform for the doped-Er-based optical devices and their quantum optics applications. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement.
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页码:2843 / 2849
页数:7
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