Investigation of parameters of thin films deposited on planar waveguides

被引:4
|
作者
Augusciuk, E [1 ]
Roszko, M [1 ]
Fabianowski, W [1 ]
机构
[1] Warsaw Univ Technol, Fac Phys, Warsaw, Poland
来源
关键词
waveguide; optical sensors;
D O I
10.1117/12.409183
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Using the method of m-line spectroscopy [1] it is possible to determine parameters (thickness and refractive index) of thin films deposited on planar waveguides through indirect measurement of changes of coupling angle to the waveguide. The subject of the study were thin organic films deposited on waveguides by casting diluted polymerizable solutions, and by spin-coating thin polyimide films. These films are developed as active coatings in waveguide sensors. Numerical calculations (applied for three-layer structures) after modification to a four-layer structure allows for determining the parameters of thin films.
引用
收藏
页码:168 / 170
页数:3
相关论文
共 50 条
  • [41] Spectrum Diagnostics for Optimization of Experimental Parameters in Thin Films Deposited by Magnetron Sputtering
    Guo Qing-lin
    Cui Yong-liang
    Chen Jian-hui
    Zhang Jin-ping
    Huai Su-fang
    Liu Bao-ting
    Chen Jin-zhong
    SPECTROSCOPY AND SPECTRAL ANALYSIS, 2010, 30 (12) : 3179 - 3182
  • [42] Influence of the Deposition Parameters on the Characteristics of Aerosol-Gel Deposited Thin Films
    M. Langlet
    C. Vautey
    Journal of Sol-Gel Science and Technology, 1997, 8 : 347 - 351
  • [43] Influence of process parameters on the growth of pulsed laser deposited thin bismuth films
    Boffoue, O
    Lenoir, B
    Hennet, L
    Maloufi, N
    Scherrer, H
    Dauscher, A
    ALT '97 INTERNATIONAL CONFERENCE ON LASER SURFACE PROCESSING, 1998, 3404 : 61 - 67
  • [44] Influence of the deposition parameters on the characteristics of aerosol-gel deposited thin films
    M. Langlet
    C. Vautey
    Journal of Sol-Gel Science and Technology, 1997, 8 : 347 - 351
  • [45] Influence of the deposition parameters on the characteristics of aerosol-gel deposited thin films
    Langlet, M
    Vautey, C
    JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 1997, 8 (1-3) : 347 - 351
  • [46] Alumina thin films as optical waveguides
    Stadler, BJH
    Oliveria, M
    Bouthillette, LO
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1995, 78 (12) : 3336 - 3344
  • [47] Alumina thin films as optical waveguides
    Stadler, Bethanie J.H., 1600, American Ceramic Soc, Westerville, OH, United States (78):
  • [48] Investigation of the parameters of an RC circuit based on thin superconducting films
    Arutyunyan, V.M.
    Buniatyan, V.V.
    Sarkisyan, A.V.
    Avetisyan, R.A.
    Radiotekhnika i Elektronika, 2002, 47 (06): : 757 - 760
  • [49] Investigation of the parameters of an RC circuit based on thin superconducting films
    Aroutiounian, VM
    Buniatyan, VV
    Sarkisyan, AV
    Avetisyan, RA
    JOURNAL OF COMMUNICATIONS TECHNOLOGY AND ELECTRONICS, 2002, 47 (06) : 681 - 684
  • [50] Investigation of optical parameters of thermally evaporated ZnSe thin films
    Gullu, H. H.
    Coskun, E.
    Parlak, M.
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 12, NO 9-11, 2015, 12 (9-11): : 1224 - 1228