Properties of GaN-based laser diodes with a buried-ridge structure

被引:2
|
作者
Asatsuma, T
Nakajima, H
Hashimoto, S
Yamaguchi, T
Yoshida, H
Tomiya, S
Asano, T
Hino, T
Ozawa, M
Miyajima, T
Kobayashi, T
Ikeda, M
机构
[1] Sony Corp, Core Technol & Network Co, Semicond Co, Hodogaya Ku, Kanagawa 2400036, Japan
[2] Sony Corp, Tech Support Ctr, Hodogaya Ku, Kanagawa 2400036, Japan
[3] Sony Shiroishi Semicond Inc, Dev Ctr, Shiroishi, Miyagi 9890734, Japan
关键词
laser diodes; GaN; index-guiding; buried-ridge structure;
D O I
10.1016/S0022-0248(00)00792-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The buried-ridge structure was introduced to GaN-based laser diodes for the purpose of realizing an index-guided structure in order to control the difference of effective refractive indexes between the inside and outside of the lasing area and to stabilize the lasing mode. Low-temperature-grown AlxGa(1 - x)N was used as the burying layer, and it was found that the refractive-index difference can be controlled by adjusting the Al content in the AlxGa(1 - x)N burying layer independent of the ridge dimensions. As a result of fabricating LDs with different Al contents, we found that Al content should be more than 30% in order to form an index-guided structure. The optimum refractive-index difference was estimated by fitting with the calculation. The LD with a buried-ridge structure, in which Al in the burying layer was more than 30%, had desirable properties as an index-guided waveguide. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:640 / 645
页数:6
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