Development and application of high-end aerospace MEMS

被引：8

作者：

Yuan, Weizheng ^{[1
,2
,3
]}

机构：

[1] Minist Educ, Key Lab Micro Nano Syst Aerosp, Xian 710072, Shaanxi, Peoples R China

[2] Key Lab Micro Nano Electromech Syst, Xian 710072, Shaanxi, Peoples R China

[3] Northwestern Polytech Univ, Dept Microsyst Engn, Xian 710072, Shaanxi, Peoples R China

来源：

FRONTIERS OF MECHANICAL ENGINEERING | 2017年 / 12卷 / 04期

关键词：

MEMS; design and manufacture technology; aeronautic and aerospace; SENSOR; DESIGN;

D O I：

10.1007/s11465-017-0424-3

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

This paper introduces the design and manufacturing technology of aerospace microelectromechanical systems (MEMS) characterized by high performance, multi-variety, and small batch. Moreover, several kinds of special MEMS devices with high precision, high reliability, and environmental adaptability, as well as their typical applications in the fields of aeronautics and aerospace, are presented.

引用

页码：567 / 573

页数：7

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