Development and application of high-end aerospace MEMS

被引：8
|
作者：
Yuan, Weizheng [1 ,2 ,3 ]
机构：
[1] Minist Educ, Key Lab Micro Nano Syst Aerosp, Xian 710072, Shaanxi, Peoples R China
[2] Key Lab Micro Nano Electromech Syst, Xian 710072, Shaanxi, Peoples R China
[3] Northwestern Polytech Univ, Dept Microsyst Engn, Xian 710072, Shaanxi, Peoples R China
来源：
FRONTIERS OF MECHANICAL ENGINEERING | 2017年 / 12卷 / 04期
关键词：
MEMS; design and manufacture technology; aeronautic and aerospace; SENSOR; DESIGN;
D O I：
10.1007/s11465-017-0424-3
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
This paper introduces the design and manufacturing technology of aerospace microelectromechanical systems (MEMS) characterized by high performance, multi-variety, and small batch. Moreover, several kinds of special MEMS devices with high precision, high reliability, and environmental adaptability, as well as their typical applications in the fields of aeronautics and aerospace, are presented.
引用
收藏
页码：567 / 573
页数：7
相关论文
共 50 条
  • [21] Application of dry etching process on high-end Cr photomasks
    Park, KT
    Lee, KY
    PHOTOMASK AND X-RAY MASK TECHNOLOGY V, 1998, 3412 : 246 - 251
  • [22] APPLICATION OF DESIGN PSYCHOLOGY IN INTERACTIVE DESIGN OF HIGH-END EQUIPMENT
    Huang, Xujing
    Hu, Xiaolin
    PSYCHIATRIA DANUBINA, 2021, 33 : S473 - S474
  • [23] Pain and Breakthrough Path in High-end Catering Transformation Development
    Xu Junyi
    PROCEEDINGS OF THE 2016 4TH INTERNATIONAL CONFERENCE ON MANAGEMENT SCIENCE, EDUCATION TECHNOLOGY, ARTS, SOCIAL SCIENCE AND ECONOMICS (MSETASSE-16), 2016, 85 : 1499 - 1502
  • [24] Entering the high-end market by collecting and remanufacturing a competitor's high-end cores
    Xue, Dongmei
    Teunter, Ruud H.
    Zhu, Stuart X.
    Zhou, Weihua
    OMEGA-INTERNATIONAL JOURNAL OF MANAGEMENT SCIENCE, 2021, 99
  • [25] LSI Packaging Development for High-end CPU Built into Supercomputer
    Fujimori, Joji
    Koide, Masateru
    2011 IEEE 61ST ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2011, : 2028 - 2032
  • [26] High-End Macao Products Aid Development of Chinese Chip
    Tao Heng
    中国新闻发布(英文版), 2024, (12) : 9 - 13
  • [27] FIR filter implementation for high-performance application in a high-end FPGA
    Pijetlovic, Stefan
    Subotic, Milos
    Marinkovic, Vladimir
    Pjevalica, Nebojsa
    2018 26TH TELECOMMUNICATIONS FORUM (TELFOR), 2018, : 333 - 336
  • [28] CUSTOM HIGH-END JEWELRY
    收藏与投资, 2014, (04) : 96 - 97
  • [29] Cover: High-end coating
    Anon
    Paper, Film and Foil Converter, 2002, 76 (03):
  • [30] High-end colored gems
    Pay, Duncan
    GEMS & GEMOLOGY, 2015, 51 (01): : 76 - 77
12345