Fiber-Core-Matched Three-Dimensional Adiabatic Tapered Couplers for Integrated Photonic Devices

被引：27

作者：

Liao, Chun-Wei ^{[1
]}

Yang, Yao-Tsu ^{[1
]}

Huang, Sheng-Wen ^{[1
]}

Lee, Ming-Chang M. ^{[1
]}

机构：

[1] Natl Tsing Hua Univ, Inst Photon Technol, Hsinchu 30013, Taiwan

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 2011年 / 29卷 / 05期

关键词：

Integrated optics; optical fiber applications; nanophotonics; SILICON OXYNITRIDE FILMS; WAVE-GUIDES; CONVERTER;

D O I：

10.1109/JLT.2010.2101581

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A three-dimensional (3-D) adiabatic tapered coupler is demonstrated to improve light coupling between single-mode fibers (SMF) and an integrated photonic chip. This 3-D taper, made by polymer via a fabrication process using mode extrusion in combination with photolithography, can have a large coupling area matching with a fiber core. For a silicon oxynitride waveguide coupling to a SMF, the measured coupler loss was 3 dB. The fiber misalignment tolerance is 3.5 mu m and 3 to 5 mu m for the lateral and vertical offset, respectively, according to a 3-dB loss window.

引用

页码：770 / 774

页数：5

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