Fiber-Core-Matched Three-Dimensional Adiabatic Tapered Couplers for Integrated Photonic Devices

被引：27
|
作者：
Liao, Chun-Wei [1 ]
Yang, Yao-Tsu [1 ]
Huang, Sheng-Wen [1 ]
Lee, Ming-Chang M. [1 ]
机构：
[1] Natl Tsing Hua Univ, Inst Photon Technol, Hsinchu 30013, Taiwan
来源：
JOURNAL OF LIGHTWAVE TECHNOLOGY | 2011年 / 29卷 / 05期
关键词：
Integrated optics; optical fiber applications; nanophotonics; SILICON OXYNITRIDE FILMS; WAVE-GUIDES; CONVERTER;
D O I：
10.1109/JLT.2010.2101581
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A three-dimensional (3-D) adiabatic tapered coupler is demonstrated to improve light coupling between single-mode fibers (SMF) and an integrated photonic chip. This 3-D taper, made by polymer via a fabrication process using mode extrusion in combination with photolithography, can have a large coupling area matching with a fiber core. For a silicon oxynitride waveguide coupling to a SMF, the measured coupler loss was 3 dB. The fiber misalignment tolerance is 3.5 mu m and 3 to 5 mu m for the lateral and vertical offset, respectively, according to a 3-dB loss window.
引用
收藏
页码：770 / 774
页数：5
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