Development of 10kΩ Quantum Hall Array Resistor

被引:0
|
作者
Zhong Qing [1 ]
Wang Xueshen [1 ]
Li Jinjin [1 ]
Lu Yunfeng [1 ]
Li Zhengkun [1 ]
Fu Kai [1 ]
机构
[1] Natl Inst Metrol, 18 Bei San Huan Dong Lu, Beijing, Peoples R China
关键词
Quantum Hall effect (QHE); quantum Hall array resistance standards (QHARS); Direct Current Comparator (DCC);
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We reported the fabrication and characterization of the 10k Omega standard resistor which consists of 12 single quantum Hall bars on the AlGaAs/GaAs 2D electron gas wafer. The designed deviation of this resistor with the 10k Omega value is - 3.42 x 10(8) Ohm/Ohm. The preliminary DCC (digital current comparator) measurement shows that the value of the 10141 standard resistor deviates from the designed one of (-34.6 +/- 7.97) x 10(-8) Omega/Omega. Accurate measurements are in progress.
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页数:2
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