Structural and light-emission modification in chemically-etched porous silicon

被引:0
|
作者
Navarro-Urrios, A
Perez-Padron, C
Lorenzo, E
Capuj, NE
Gaburro, Z
Oton, CJ
Pavesi, L
机构
[1] Univ La Laguna, Dept Fis Basica, San Cristobal la Laguna 38071, Spain
[2] Univ Trent, INFM, I-38050 Trento, Italy
[3] Univ Trent, Dipartimento Fis, I-38050 Trento, Italy
关键词
D O I
10.1002/pssa.200461168
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
After electrochemical etching, we have made a study of the effects generated on p(+)-type porous silicon layers when they are left in presence of the electrolyte for different post-etching times. Using an interferometric technique, we have monitored the change of its porosity during the post-etch process due to a chemical dissolution mechanism. These data are complemented with a study of photoluminescence and transmission electron microscopy measurements for different post-etching times. (c) 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:1518 / 1523
页数:6
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