GaN/AlGaN nanocavities with AlN/GaN Bragg reflectors grown in AlGaN nanocolumns by plasma assisted MBE

被引:14
|
作者
Ristic, J
Calleja, E
Fernández-Garrido, S
Trampert, A
Jahn, U
Ploog, KH
Povoloskyi, M
Di Carlo, A
机构
[1] Univ Politecn Madrid, ISOM, E-28040 Madrid, Spain
[2] Univ Politecn Madrid, ETSI Telecomun, Dept Ingn Elect, E-28040 Madrid, Spain
[3] Paul Drude Inst Festkorperelekt, D-10117 Berlin, Germany
[4] Univ Roma Tor Vergata, Dipartimento Ingn Elettron, I-00133 Rome, Italy
关键词
D O I
10.1002/pssa.200460327
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The successful growth of AlGaN nanocolumns by plasma assisted MBE, with different Al compositions, opened the way for achieving nano-heterostructures including GaN Quantum Discs (QDss). The luminescence emission from the QDss embedded in the AlGaN nanocolumns was tuned by changing their thickness and/or the Al composition of the barriers. Such a nano-heterostructure was then enclosed between two AlN/GaN Distributed Bragg Reflectors (DBR), with nominal reflectivities of 90 and 50%. The choice of the AlN/GaN bilayers for the DBRs allowed to reach these reflectivity values with a significantly lower number of periods, as compared to the AlGaN/GaN stacks. The resulting nanocavity has been characterized by cathodoluminescence (CL), and Scanning and Transmission Electron Microscopy (SEM, TEM). CL measurements show that the emission from the nanocavity is quite close to the targeted value. TEM data points to the need of optimized conditions to grow AlN columnar layers in order to avoid the lateral overgrowth in the columnar nanostructure.
引用
收藏
页码:367 / 371
页数:5
相关论文
共 50 条
  • [1] Columnar AlGaN/GaN nanocavities with AlN/GaN Bragg reflectors grown by molecular beam epitaxy on Si(111) -: art. no. 146102
    Ristic, J
    Calleja, E
    Trampert, A
    Fernández-Garrido, S
    Rivera, C
    Jahn, U
    Ploog, KH
    [J]. PHYSICAL REVIEW LETTERS, 2005, 94 (14)
  • [2] AlGaN nanocolumns and AlGaN/GaN/AlGaN nanostructures grown by molecular beam epitaxy
    Ristic, J
    Sánchez-García, MA
    Ulloa, JM
    Calleja, E
    Sanchez-Páramo, J
    Calleja, JM
    Jahn, U
    Trampert, A
    Ploog, KH
    [J]. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2002, 234 (03): : 717 - 721
  • [3] Electrical characterisation of GaN and AlGaN layers grown by plasma-assisted MBE
    Kolkovsky, V.
    Scheffler, L.
    Sobanska, M.
    Klosek, K.
    Zytkiewicz, Z. R.
    Weber, J.
    [J]. PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 9, NO 3-4, 2012, 9 (3-4): : 1043 - 1047
  • [4] In as a surfactant for the growth of AlGaN/GaN heterostructures by plasma assisted MBE
    Monroy, E
    Gogneau, N
    Bellet-Amalric, E
    Enjalbert, F
    Barjon, J
    Jalabert, D
    Brault, J
    Dang, LS
    Daudin, B
    [J]. GAN AND RELATED ALLOYS-2002, 2003, 743 : 369 - 374
  • [5] AlGaN/GaN HEMTs grown by ammonia MBE
    Volkov, VV
    Ivanova, VP
    Kuz'michev, YS
    Lermontov, SA
    Solov'ev, YV
    Baranov, DA
    Kaidash, AP
    Krasovitskii, DM
    Pavlenko, MV
    Petrov, SI
    Pogorel'skii, YV
    Sokolov, IA
    Sokolov, MA
    Stepanov, MV
    Chalyi, VP
    [J]. TECHNICAL PHYSICS LETTERS, 2004, 30 (05) : 380 - 382
  • [6] AlGaN/GaN HEMTs grown by ammonia MBE
    V. V. Volkov
    V. P. Ivanova
    Yu. S. Kuz’michev
    S. A. Lermontov
    Yu. V. Solov’ev
    D. A. Baranov
    A. P. Kaidash
    D. M. Krasovitskii
    M. V. Pavlenko
    S. I. Petrov
    Yu. V. Pogorel’skii
    I. A. Sokolov
    M. A. Sokolov
    M. V. Stepanov
    V. P. Chalyi
    [J]. Technical Physics Letters, 2004, 30 : 380 - 382
  • [7] Suppression of crack generation in AlGaN/GaN distributed Bragg reflectors grown by MOVPE
    Moudakir, T.
    Gautier, S.
    Suresh, S.
    Abid, M.
    El Gmili, Y.
    Patriarche, G.
    Pantzas, K.
    Troadec, D.
    Jacquet, J.
    Genty, F.
    Voss, P.
    Ougazzaden, A.
    [J]. JOURNAL OF CRYSTAL GROWTH, 2013, 370 : 12 - 15
  • [8] Dislocation free AlGaN/GaN MQW grown on GaN substrates by MBE
    Porowski, S
    Grzegory, I
    Bockowski, M
    Leszczynski, M
    Korakakis, D
    Bell, A
    Harrison, I
    Foxon, CT
    Albrecht, M
    Strunk, HP
    Davidson, JA
    Dawson, P
    [J]. BLUE LASER AND LIGHT EMITTING DIODES II, 1998, : 443 - 444
  • [9] Surface morphology of AlGaN/GaN heterostructures grown on bulk GaN by MBE
    Hentschel, R.
    Gaertner, J.
    Wachowiak, A.
    Grosser, A.
    Mikolajick, T.
    Schmult, S.
    [J]. JOURNAL OF CRYSTAL GROWTH, 2018, 500 : 1 - 4
  • [10] High power GaN/AlGaN/GaN HEMTs operating at 2 to 25 GHz grown by plasma-assisted MBE
    Manfra, MJ
    Weimann, NG
    Mitrofanov, O
    Waechtler, T
    Tennant, DM
    [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 2003, 200 (01): : 175 - 178