Development of P-on-N silicon photomultiplier prototype for blue light detection

被引:0
|
作者
Lim, K. T. [1 ]
Lee, D. [1 ]
Park, K. [1 ]
Kim, G. [1 ]
Lee, M. [1 ]
Kim, Y. [1 ]
Kim, M. [1 ]
Kim, J. [1 ]
Kim, H. [2 ]
Lee, E. [1 ]
Sul, W. S. [3 ]
Cho, G. [1 ]
机构
[1] Korea Adv Inst Sci & Technol, 291 Daehak Ro, Daejeon 34141, South Korea
[2] Korea Atom Energy Res Inst, 989 Daeduk r*, 989 Daeduk Ro, Daejeon 34057, South Korea
[3] Natl Nanofab Ctr, 291 Daehak Ro, Daejeon 34141, South Korea
来源
关键词
Photon detectors for UV; visible and IR photons (solid-state) (PIN diodes; APDs; SiPMTs; G-APDs; CCDs; EBCCDs; EMCCDs etc); Gamma camera; SPECT; PET PET/CT; coronary CT angiography (CTA); Solid state detectors; AVALANCHE PHOTODIODES;
D O I
10.1088/1748-0221/12/11/C11006
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
In this paper, we report a preliminary study on the electrical and optical properties of the first P-on-N SiPM prototype developed at KAIST with a collaboration of NNFC. The sensors were fabricated on a 200mm n-type silicon epitaxial-layer wafer via customized CMOS process at NNFC. Measurements on the reverse current were carried out on a wafer-level with an auto-probing station and breakdown voltage was found as 32.3 V. As for optical characterization, gain, dark count rate, and photon detection efficiency have been measured as a function of bias voltage at room temperature. In particular, we show that the device had a comparable gain of similar to 10(6) with respect to conventional PMTs and had a peak sensitivity in blue light regime. Furthermore, we attempt to explain possible causes of some of phenomena seen from the device characterization.
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页数:8
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