Modulated free-carrier absorption in silicon - a spectroscopy approach

被引:2
|
作者
Bychto, Leszek [1 ]
Patryn, Aleksy [1 ]
机构
[1] Koszalin Univ Technol, Elect & Comp Sci, PL-75453 Koszalin, Poland
来源
关键词
modulated free-carrier absorption (MFCA); photocarrier radiometry (PCR); silicon; spectroscopy; RADIOMETRY; WAFERS;
D O I
10.1002/pssb.201451416
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
In the paper, an analysis of the spectral characteristics of the MFCA (modulated free-carrier absorption) signal for silicon 3-5 cm, n-type is presented. During the change of the wavelength of a probe light, three distinctive regions are observed in the amplitude and the phase characteristics. In the first region ((probe)<<hc/E-g), only the PCR (photocarrier radiometry) signal exists. The second region ((probe)>hc/E-g) is typical for the MFCA signal. The nature of the third region ((probe) near hc/E-g), characterized by a long relaxation time is being studied here. The spectroscopy approach to the MFCA technique provided an opportunity to explain the type of free-carrier scattering mechanism that dominates in the NIR region. In the paper, an attempt was also undertaken to estimate the recombination parameters of the sample. (C) 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
引用
收藏
页码:1311 / 1318
页数:8
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