Surface engineering for microfabrication

被引：0
|
作者：
Grimes, Michael [1 ]
Kobrin, Boris [1 ]
机构：
[1] Appl Microstruct Inc, San Jose, CA 95131 USA
来源：
SOLID STATE TECHNOLOGY | 2008年 / 51卷 / 01期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Richard Feynman predicted the emergence of the nanotechnology field during a now-famous Caltech lecture in 1959 [1]. Today, from cellular phone microphones to stain-resistant fabrics, the products engineered using nanotechnology span many applications and have found their way into mainstream goods. Surface engineering is a versatile technique in which making very small-scale substrate changes can lead to large-scale device performance improvements.
引用
收藏
页码：28 / +
页数：3
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