Surface engineering for microfabrication

被引：0

作者：

Grimes, Michael ^{[1
]}

Kobrin, Boris ^{[1
]}

机构：

[1] Appl Microstruct Inc, San Jose, CA 95131 USA

来源：

SOLID STATE TECHNOLOGY | 2008年 / 51卷 / 01期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Richard Feynman predicted the emergence of the nanotechnology field during a now-famous Caltech lecture in 1959 [1]. Today, from cellular phone microphones to stain-resistant fabrics, the products engineered using nanotechnology span many applications and have found their way into mainstream goods. Surface engineering is a versatile technique in which making very small-scale substrate changes can lead to large-scale device performance improvements.

引用

页码：28 / +

页数：3

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