Surface engineering for microfabrication

被引:0
|
作者
Grimes, Michael [1 ]
Kobrin, Boris [1 ]
机构
[1] Appl Microstruct Inc, San Jose, CA 95131 USA
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Richard Feynman predicted the emergence of the nanotechnology field during a now-famous Caltech lecture in 1959 [1]. Today, from cellular phone microphones to stain-resistant fabrics, the products engineered using nanotechnology span many applications and have found their way into mainstream goods. Surface engineering is a versatile technique in which making very small-scale substrate changes can lead to large-scale device performance improvements.
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页码:28 / +
页数:3
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