Simulation and Experimental Studies of an Uncooled MEMS Capacitive Infrared Detector for Thermal Imaging

被引：2
|
作者：
Wang, Weidong [1 ]
Upadhyay, Vandana [1 ]
Bumgarner, John [1 ]
Edwards, Oliver [1 ]
机构：
[1] Univ S Florida, Coll Marine Sci, Ctr Ocean Technol, 140 7th Ave S, St Petersburg, FL 33701 USA
来源：
INTERNATIONAL MEMS CONFERENCE 2006 | 2006年 / 34卷
基金：
美国国家科学基金会;
关键词：
Finite element analysis (FEA); MEMS; IR imaging; Focal plane array (FPA);
D O I：
10.1088/1742-6596/34/1/057
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
This paper presents the finite element analysis (FEA) simulation results and electrostatic characterizations of an uncooled MEMS capacitive IR detector. Thermal, thermal-structural and electrostatic-structural behaviors were simulated. The peak displacement sensitivities were calculated as 0.109nm/pW.mu m(-2) and 0.029nm/pW.mu m(-2) for 100 mu m and 50 mu m plates, respectively. Electrostatic-structural pull-in behaviors of the devices were tested and the results agreed with simulation well when second order mode pull-in was considered in the FEA model.
引用
收藏
页码：350 / 355
页数：6
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