Simulation and Experimental Studies of an Uncooled MEMS Capacitive Infrared Detector for Thermal Imaging

被引：2

作者：

Wang, Weidong ^{[1
]}

Upadhyay, Vandana ^{[1
]}

Bumgarner, John ^{[1
]}

Edwards, Oliver ^{[1
]}

机构：

[1] Univ S Florida, Coll Marine Sci, Ctr Ocean Technol, 140 7th Ave S, St Petersburg, FL 33701 USA

来源：

INTERNATIONAL MEMS CONFERENCE 2006 | 2006年 / 34卷

基金：

美国国家科学基金会;

关键词：

Finite element analysis (FEA); MEMS; IR imaging; Focal plane array (FPA);

D O I：

10.1088/1742-6596/34/1/057

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper presents the finite element analysis (FEA) simulation results and electrostatic characterizations of an uncooled MEMS capacitive IR detector. Thermal, thermal-structural and electrostatic-structural behaviors were simulated. The peak displacement sensitivities were calculated as 0.109nm/pW.mu m(-2) and 0.029nm/pW.mu m(-2) for 100 mu m and 50 mu m plates, respectively. Electrostatic-structural pull-in behaviors of the devices were tested and the results agreed with simulation well when second order mode pull-in was considered in the FEA model.

引用

页码：350 / 355

页数：6

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