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Bifunctional catalytic effect of Mo2C/oxide interface on multi-layer graphene growth
被引:3
|作者:
Kizir, Seda
[1
]
van den Beld, Wesley T. E.
[1
]
Schurink, Bart
[1
]
van de Kruijs, Robbert W. E.
[1
]
Benschop, Jos P. H.
[1
,2
]
Bijkerk, Fred
[1
]
机构:
[1] Univ Twente, MESA Inst Nanotechnol, Ind Focus Grp XUV Opt, NL-7522 NB Enschede, Netherlands
[2] ASML Netherlands BV, NL-5504 DR Veldhoven, Netherlands
关键词:
CHEMICAL-VAPOR-DEPOSITION;
CARBON NANOTUBE GROWTH;
MOLYBDENUM CARBIDE;
SILICON-CARBIDE;
CVD GROWTH;
SUPPORT;
HYDROGEN;
OXYGEN;
AROMATIZATION;
OXIDATION;
D O I:
10.1038/s41598-021-94694-4
中图分类号:
O [数理科学和化学];
P [天文学、地球科学];
Q [生物科学];
N [自然科学总论];
学科分类号:
07 ;
0710 ;
09 ;
摘要:
The role of the Mo2C/oxide interface on multi-layer graphene (MLG) nucleation during a chemical vapor deposition (CVD) process is investigated. During the CVD process, MLG growth is only observed in the presence of a Mo2C/SiO2 interface, indicating that the chemical reactions occurring at this interface trigger the nucleation of MLG. The chemical reaction pathway is explained in four steps as (1) creation of H radicals, (2) reduction of the oxide surface, (3) formation of C-C bonds at O-H sites, and (4) expansion of graphitic domains on the Mo2C catalyst. Different Mo2C/oxide interfaces are investigated, with varying affinity for reduction in a hydrogen environment. The results demonstrate a catalyst/oxide bifunctionality on MLG nucleation, comprising of CH4 dehydrogenation by Mo2C and initial C-C bond formation at the oxide interface.
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页数:8
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