Bifunctional catalytic effect of Mo2C/oxide interface on multi-layer graphene growth

被引:3
|
作者
Kizir, Seda [1 ]
van den Beld, Wesley T. E. [1 ]
Schurink, Bart [1 ]
van de Kruijs, Robbert W. E. [1 ]
Benschop, Jos P. H. [1 ,2 ]
Bijkerk, Fred [1 ]
机构
[1] Univ Twente, MESA Inst Nanotechnol, Ind Focus Grp XUV Opt, NL-7522 NB Enschede, Netherlands
[2] ASML Netherlands BV, NL-5504 DR Veldhoven, Netherlands
关键词
CHEMICAL-VAPOR-DEPOSITION; CARBON NANOTUBE GROWTH; MOLYBDENUM CARBIDE; SILICON-CARBIDE; CVD GROWTH; SUPPORT; HYDROGEN; OXYGEN; AROMATIZATION; OXIDATION;
D O I
10.1038/s41598-021-94694-4
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
The role of the Mo2C/oxide interface on multi-layer graphene (MLG) nucleation during a chemical vapor deposition (CVD) process is investigated. During the CVD process, MLG growth is only observed in the presence of a Mo2C/SiO2 interface, indicating that the chemical reactions occurring at this interface trigger the nucleation of MLG. The chemical reaction pathway is explained in four steps as (1) creation of H radicals, (2) reduction of the oxide surface, (3) formation of C-C bonds at O-H sites, and (4) expansion of graphitic domains on the Mo2C catalyst. Different Mo2C/oxide interfaces are investigated, with varying affinity for reduction in a hydrogen environment. The results demonstrate a catalyst/oxide bifunctionality on MLG nucleation, comprising of CH4 dehydrogenation by Mo2C and initial C-C bond formation at the oxide interface.
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页数:8
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