Back-thinned CMOS Sensor Optimisation

被引：15
|
作者：
Jerram, Paul [1 ]
Burt, David [1 ]
Guyatt, Neil [1 ]
Hibon, Vincent [2 ]
Vaillant, Joel [2 ]
Henrion, Yann [2 ]
机构：
[1] E2V Technol, Waterhouse Lane, Chelmsford CM1 2QU, Essex, England
[2] E2V Semicond SAS, Saint Egreve, France
来源：
OPTICAL COMPONENTS AND MATERIALS VII | 2010年 / 7598卷
关键词：
D O I：
10.1117/12.852389
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Back-thinning of a CCD image sensor is a very well established process for achieving high quantum efficiency and the majority of high-specification space and science applications have used such back-thinned devices for many years. CMOS sensors offer advantages over CCDs for a number of these applications and, in principle, it should be possible to back-thin CMOS devices and obtain the same performance as the CCD. This has now been demonstrated by e2v and results from two recent programmes to back-thin CMOS sensors show excellent quantum efficiency values.
引用
收藏
页数：12
相关论文
共 50 条
  • [1] Optical and electrical characterization of a back-thinned CMOS active pixel sensor
    Blue, Andrew
    Clark, A.
    Houston, S.
    Laing, A.
    Maneuski, D.
    Prydderch, M.
    Turchetta, R.
    O'Shea, V.
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2009, 604 (1-2): : 215 - 217
  • [2] A 9 megapixel large-area back-thinned CMOS sensor with high sensitivity and high frame-rate for the TAOS II program
    Pratlong, Jerome
    Wang, Shiang-Yu
    Lehner, Matthew
    Jorden, Paul
    Jerram, Paul
    Johnson, Steven
    [J]. HIGH ENERGY, OPTICAL, AND INFRARED DETECTORS FOR ASTRONOMY VII, 2016, 9915
  • [3] Digital Autoradiography imaging using CMOS technology: First Tritium Autoradiography with a back-thinned CMOS detector and comparison of CMOS imaging performance with autoradiography film
    Cabello, J.
    Wells, K.
    Metaxas, A.
    Bailey, A.
    Kitchen, I.
    Clark, A.
    Prydderch, A.
    Turchetta, R.
    [J]. 2007 IEEE NUCLEAR SCIENCE SYMPOSIUM CONFERENCE RECORD, VOLS 1-11, 2007, : 3743 - +
  • [4] High-speed camera with a back-thinned 16-port frame transfer CCD sensor
    Turko, BT
    Yates, GJ
    Albright, KL
    Pena, CR
    [J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1995, 42 (06) : 2327 - 2330
  • [5] Comparison of Back-Thinned Detector Ultraviolet Quantum Efficiency for Two Commercially Available Passivation Treatments
    Heymes, Julian
    Soman, Matthew
    Randall, George
    Gottwald, Alexander
    Harris, Andrew
    Kelt, Andrew
    Moody, Ian
    Meng, Xiao
    Holland, Andrew D.
    [J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2020, 67 (08) : 1962 - 1967
  • [6] Vacuum ultraviolet, 157 nm video-rate imaging with a reflective optics and a back-thinned CCD camera
    Kozeki, T
    Liu, ZL
    Sarukura, N
    Hirano, M
    Hosono, H
    [J]. CLEO(R)/PACIFIC RIM 2001, VOL I, TECHNICAL DIGEST, 2001, : 480 - 481
  • [7] Reevaluation of absolute luminescence quantum yields of standard solutions using a spectrometer with an integrating sphere and a back-thinned CCD detector
    Suzuki, Kengo
    Kobayashi, Atsushi
    Kaneko, Shigeo
    Takehira, Kazuyuki
    Yoshihara, Toshitada
    Ishida, Hitoshi
    Shiina, Yoshimi
    Oishic, Shigero
    Tobita, Seiji
    [J]. PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 2009, 11 (42) : 9850 - 9860
  • [8] Development of a thinned back-illuminated CMOS active pixel sensor for extreme ultraviolet spectroscopy and imaging in space science
    Waltham, N. R.
    Prydderch, M.
    Mapson-Menard, H.
    Pool, P.
    Harris, A.
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2007, 573 (1-2): : 250 - 252
  • [9] The dual-gain 10 μm back-thinned 3k x 3k CMOS-APS detector of the Solar Orbiter Extreme UV Imager
    Halain, J. -P.
    Debaize, A.
    Gillis, J. M.
    Jacques, L.
    De Ridder, T.
    Hermans, L.
    Koch, M.
    Meynants, G.
    Schippers, G.
    [J]. SPACE TELESCOPES AND INSTRUMENTATION 2014: ULTRAVIOLET TO GAMMA RAY, 2014, 9144
  • [10] Development of a thinned back-illuminated CMOS active pixel sensor for extreme ultra violet spectroscopy and imaging in space science
    Waltham, Nick
    Prydderch, Mark
    Mapson-Menard, Helen
    Clapp, Matthew
    Pool, Peter
    Harris, Andrew
    [J]. FOCAL PLANE ARRAYS FOR SPACE TELESCOPES III, 2007, 6690
12345