Multi-axis Parallelism Measuring System with Temperature Insensitivity

被引：0
|
作者：
Zhang, Lei [1 ]
Zhang, Kai [1 ]
机构：
[1] Changchun Univ Sci & Technol, Sch Optoelect Engn, Changchun 130022, Jilin, Peoples R China
来源：
2017 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY - OPTOELECTRONIC MEASUREMENT TECHNOLOGY AND SYSTEMS | 2017年 / 10621卷
关键词：
multi-axis parallelism; athermalization; collimator;
D O I：
10.1117/12.2288058
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
In order to detect the parallelism of optical axis of photoelectric device accurately in large temperature difference environment, we design a measuring system based on Cassegrain structure. The system is adapt to the temperature range from -40 degrees C to +55 degrees C with the spectral bandwidth from 0.4 mu m to 12 mu m. According to the demand of temperature stability, the athermal structure of the system is analyzed and the compensation by different mechanical materials is carried out. The beam parallel deviation is less than 4 '' in different temperature. The experimental result shows that the system has good temperature stability.
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页数：8
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