Structure dependent charging process in RF MEMS capacitive switches

被引：49
|
作者：
Papandreou, E.
Lamhamdi, M.
Skoulikidou, C. M.
Pons, P.
Papaioannou, G.
Plana, R.
机构：
[1] Univ Athens, Solid State Phys Sect, Athens, Greece
[2] CNRS, LAAS, F-31077 Toulouse, France
来源：
MICROELECTRONICS RELIABILITY | 2007年 / 47卷 / 9-11期
关键词：
D O I：
10.1016/j.microrel.2007.07.100
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The paper investigates the dependence of charging process on the dielectric charging of radiation induced defects in Si3N4 and SiO2 dielectric films, which are used in RF-MEMS switches. The radiation has been performed with 5 MeV alpha particles. The assessment has been carried out in Metal-Insulator-Metal capacitors with the thermally stimulated depolarization currents and discharge current transient methods. This allowed monitoring the defects introduction as a function of radiation fluence. The defects electrical characteristics that are the activation energy and corresponding depolarization time constant were determined from the evolution of the thermally stimulated current spectra and the transient response of discharge currents at different temperatures. (C) 2007 Elsevier Ltd. All rights reserved.
引用
收藏
页码：1812 / 1817
页数：6
相关论文
共 50 条
  • [21] A MIM CAPACITOR STUDY OF DIELECTRIC CHARGING FOR RF MEMS CAPACITIVE SWITCHES
    Michalas, Loukas
    Koutsoureli, Matroni
    Papandreou, Eleni
    Gantis, Anestis
    Papaioannou, George
    [J]. FACTA UNIVERSITATIS-SERIES ELECTRONICS AND ENERGETICS, 2015, 28 (01) : 113 - 122
  • [22] Dielectric Charging in Capacitive RF MEMS Switches: The Effect of Electric Stress
    Tavassolian, Negar
    Koutsoureli, Matroni
    Papaioannou, George
    Lacroix, Benjamin
    Papapolymerou, John
    [J]. 2010 ASIA-PACIFIC MICROWAVE CONFERENCE, 2010, : 1833 - 1836
  • [23] Probing contactless injection dielectric charging in RF MEMS capacitive switches
    Michalas, L.
    Koutsoureli, M.
    Papaioannou, G.
    [J]. ELECTRONICS LETTERS, 2014, 50 (10) : 766 - U153
  • [24] Contactless dielectric charging mechanisms in RF-MEMS capacitive switches
    Papaioannou, G. J.
    Wang, G.
    Bessas, D.
    Papapolymerou, J.
    [J]. 2006 EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE, 2006, : 513 - +
  • [25] A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches
    van Spengen, WM
    Puers, R
    Mertens, R
    De Wolf, I
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (04) : 514 - 521
  • [26] A low voltage MEMS structure for RF capacitive switches
    Abbaspour-Sani, E.
    Afrang, S.
    [J]. PROGRESS IN ELECTROMAGNETICS RESEARCH-PIER, 2006, 65 : 157 - 167
  • [27] Assessment of Dielectric Charging in RF MEMS Capacitive Switches with the Aid of MIM Capacitors
    Michalas, L.
    Koutsoureli, M.
    Papandreou, E.
    Gantis, A.
    Papaioannou, G.
    [J]. 2014 29TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS PROCEEDINGS - MIEL 2014, 2014, : 125 - 128
  • [28] THE IMPACT OF DIELECTRIC MATERIAL AND TEMPERATURE ON DIELECTRIC CHARGING IN RF MEMS CAPACITIVE SWITCHES
    Papaioannou, George
    [J]. ADVANCED MATERIALS AND TECHNOLOGIES FOR MICRO/NANO-DEVICES, SENSORS AND ACTUATORS, 2010, : 141 - 153
  • [29] Modeling and characterization of dielectric-charging effects in RF MEMS capacitive switches
    Yuan, XB
    Hwang, JCM
    Forehand, D
    Goldsmith, CL
    [J]. 2005 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM, VOLS 1-4, 2005, : 753 - 756
  • [30] Effect of Dielectric Film Thickness on Dielectric Charging of RF MEMS Capacitive Switches
    Daigler, R.
    Papaioannou, G.
    Papandreou, E.
    Papapolymerou, J.
    [J]. 2008 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-4, 2008, : 817 - +
12345