Assessment of Dielectric Charging in RF MEMS Capacitive Switches with the Aid of MIM Capacitors

被引：0
|
作者：
Michalas, L. [1 ]
Koutsoureli, M. [1 ]
Papandreou, E. [1 ]
Gantis, A. [1 ]
Papaioannou, G. [1 ]
机构：
[1] Univ Athens, Dept Phys, Solid State Sect, Athens 15784, Greece
来源：
2014 29TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS PROCEEDINGS - MIEL 2014 | 2014年
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Dielectric charging is an important reliability issue for RF MEMS capacitive switches still preventing their commercialization. Therefore a lot of effort has been spent on the understanding of charging and discharging processes. MIM capacitors are considered as equally important device for the assessment of dielectric charging for RF MEMS. Beside the obvious similarities between MEMS switches in the down state and MIM capacitors there are also some important differences. The present papers aims to reveal the similarities and the differences between the two types of devices by analyzing experimental data obtained on MIM capacitors and MEMS capacitive switches fabricated with the same material.
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页码：125 / 128
页数：4
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