Neutral gas rotation in magnetron discharge

被引：4
|
作者：
Pal, A. F. [1 ,2 ]
Ryabinkin, A. N. [1 ,2 ]
Serov, A. O. [1 ,2 ]
Filippov, A. V. [2 ]
机构：
[1] Moscow MV Lomonosov State Univ, Skobeltsyn Inst Nucl Phys, Moscow 119991, Russia
[2] Troitsk Inst Innovat & Fus Res, Moscow 142190, Russia
来源：
TECHNICAL PHYSICS LETTERS | 2014年 / 40卷 / 12期
基金：
俄罗斯基础研究基金会;
关键词：
Xenon; Technical Physic Letter; Neutral Component; Plasma Ring; Xenon Atom;
D O I：
10.1134/S1063785014120311
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We have experimentally established the existence and determined the velocity of motion of the neutral component of plasma in a planar magnetron discharge, which takes place in the direction of drift of the charged plasma component in crossed electric and magnetic (E x B) fields. For this purpose, we have studied the propagation of a small gaseous additive over the plasma ring of dc magnetron discharge in the diffusion regime. The obtained temporal dependences of the intensity of atomic emission spectra of the additive in various regions of the plasma ring are compared to the results of numerical solution of the diffusion equation for the experimental conditions studied.
引用
收藏
页码：1142 / 1145
页数：4
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