Neutral gas rotation in magnetron discharge

被引：4
|
作者：
Pal, A. F. [1 ,2 ]
Ryabinkin, A. N. [1 ,2 ]
Serov, A. O. [1 ,2 ]
Filippov, A. V. [2 ]
机构：
[1] Moscow MV Lomonosov State Univ, Skobeltsyn Inst Nucl Phys, Moscow 119991, Russia
[2] Troitsk Inst Innovat & Fus Res, Moscow 142190, Russia
来源：
TECHNICAL PHYSICS LETTERS | 2014年 / 40卷 / 12期
基金：
俄罗斯基础研究基金会;
关键词：
Xenon; Technical Physic Letter; Neutral Component; Plasma Ring; Xenon Atom;
D O I：
10.1134/S1063785014120311
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We have experimentally established the existence and determined the velocity of motion of the neutral component of plasma in a planar magnetron discharge, which takes place in the direction of drift of the charged plasma component in crossed electric and magnetic (E x B) fields. For this purpose, we have studied the propagation of a small gaseous additive over the plasma ring of dc magnetron discharge in the diffusion regime. The obtained temporal dependences of the intensity of atomic emission spectra of the additive in various regions of the plasma ring are compared to the results of numerical solution of the diffusion equation for the experimental conditions studied.
引用
收藏
页码：1142 / 1145
页数：4
相关论文
共 50 条
  • [1] Neutral gas rotation in magnetron discharge
    A. F. Pal
    A. N. Ryabinkin
    A. O. Serov
    A. V. Filippov
    Technical Physics Letters, 2014, 40 : 1142 - 1145
  • [2] SPECTROSCOPIC STUDY OF A DC GAS MAGNETRON DISCHARGE
    MILJEVIC, VI
    APPLIED OPTICS, 1983, 22 (06) : 904 - 907
  • [3] SPECTROSCOPIC STUDY OF THE DC GAS MAGNETRON DISCHARGE
    MILJEVIC, VI
    JOURNAL DE PHYSIQUE, 1979, 40 : 61 - 62
  • [4] MODEL OF AN ELECTRICAL DISCHARGE IN A NEUTRAL GAS
    AAMODT, RE
    PHYSICS OF FLUIDS, 1963, 6 (03) : 446 - 449
  • [5] INFLUENCE OF GAS PRESSURE ON THE GROWTH OF CLUSTERS IN MAGNETRON DISCHARGE
    Bibik, A. S.
    Demeshko, O. I.
    Kravchenko, O. Yu.
    Denysenko, I. B.
    Veklich, A. N.
    PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2025, (01): : 41 - 45
  • [6] SOME PROPERTIES OF GAS-DISCHARGE IN A MAGNETRON GEOMETRY
    KOLACEK, K
    KORBEL, S
    CZECHOSLOVAK JOURNAL OF PHYSICS, 1977, 27 (04) : 422 - 429
  • [7] Extraction of neutral particles from a gas discharge
    Rykov, A. A.
    Yurchenkov, M. I.
    Lisenkov, A. A.
    SCIENTIFIC TECHNICAL CONFERENCE ON LOW TEMPERATURE PLASMA DURING THE DEPOSITION OF FUNCTIONAL COATINGS (LTP COATINGS 2017), 2018, 1058
  • [8] Parameters of magnetron sputtering gas discharge plasma with a small anode
    Sakhapov, S. Z.
    XXXV SIBERIAN THERMOPHYSICAL SEMINAR, 2019, 2019, 1382
  • [9] INITIATION OF A DISCHARGE WITH A COLD HOLLOW CATHODE BY A GAS MAGNETRON.
    Gruzdev, V.A.
    Kreindel, Yu.E.
    Troyan, O.E.
    Soviet physics. Technical physics, 1980, 25 (10): : 1228 - 1230
  • [10] Plasmadynamical peculiarities of the cylindrical magnetron-type gas discharge
    Goncharov, A. A.
    Dobrovol's'Kii, A. N.
    Evsyukov, A. M.
    Protsenko, I. M.
    Litovko, I. V.
    PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2008, (04): : 189 - 194
12345