Closed-loop next generation laser polishing

被引：0
|
作者：
Rascher, Rolf [1 ]
Vogt, Christian [1 ]
Fahnle, Oliver [2 ]
Kim, DaeWook [3 ]
机构：
[1] Univ Appl Sci, THD, D-94469 Deggendorf, Germany
[2] FISBA AG, Rorschacherstr 268, CH-9016 St Gallen, Switzerland
[3] Univ Arizona, Tucson, AZ USA
来源：
FIFTH EUROPEAN SEMINAR ON PRECISION OPTICS MANUFACTURING | 2018年 / 10829卷
关键词：
D O I：
10.1117/12.2318749
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A novel fabrication parameter controlling method for laser polishing processes called C-Lasso (Control of LASer Surface Optimization) is presented, monitoring within the footprint the smoothening process as well as the removal of ssd in situ. Therefore, it is possible to determine and control the optimum dwell time a footprint needs to stay at a certain point before moving further enabling a more stable and cost optimized polishing.
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页数：6
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