The growth of AlGaN/GaN heterojunction bipolar transistors by metalorganic chemical vapor deposition

被引:6
|
作者
Lambert, DJH
Huang, JJ
Shelton, BS
Wong, MM
Chowdhury, U
Zhu, TG
Kwon, HK
Liliental-Weber, Z
Benarama, M
Feng, M
Dupuis, RD [1 ]
机构
[1] Univ Texas, Microelect Res Ctr, Austin, TX 78712 USA
[2] Univ Illinois, Ctr Compound Semicond Microelect, Urbana, IL 61801 USA
[3] Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA
基金
美国国家科学基金会;
关键词
Heterojunction bipolar transistor; aluminum gallium nitride; current gain;
D O I
10.1016/S0022-0248(00)00808-3
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The growth and properties of AlGaN/GaN heterojunction bipolar transistors grown by low-pressure metalorganic chemical vapor deposition (MOCVD) are described. The "emitter-up" structures are grown on (0 0 0 1) sapphire substrates, Common-emitter characteristics and Gummel plots were measured on 120 x 120 mum(2) devices and useable DC current gains of beta similar to 8-14 were achieved at room temperature. The resistance of the base was a limiting factor in high-current operation of these devices. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:730 / 733
页数:4
相关论文
共 50 条
  • [1] Selective area growth and characterization of AlGaN/GaN heterojunction bipolar transistors by metalorganic chemical vapor deposition
    Shelton, BS
    Lambert, DJH
    Huang, JJ
    Wong, MM
    Chowdhury, U
    Zhu, TG
    Kwon, HK
    Liliental-Weber, Z
    Benarama, M
    Feng, M
    Dupuis, RD
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2001, 48 (03) : 490 - 494
  • [2] Metalorganic chemical vapor deposition of AlGaAs and InGaP heterojunction bipolar transistors
    Pan, N
    Welser, RE
    Lutz, CR
    DeLuca, PM
    Han, B
    Hong, K
    [J]. JOURNAL OF CRYSTAL GROWTH, 2001, 225 (2-4) : 397 - 404
  • [3] Phase separation in AlGaN/GaN heterojunction grown by metalorganic chemical vapor deposition
    Chen, P
    Chua, SJ
    Miao, ZL
    [J]. JOURNAL OF CRYSTAL GROWTH, 2004, 273 (1-2) : 74 - 78
  • [4] Growth and doping of GaAsSb via metalorganic chemical vapor deposition for InP heterojunction bipolar transistors
    McDermott, BT
    Gertner, ER
    Pittman, S
    Seabury, CW
    Chang, MF
    [J]. APPLIED PHYSICS LETTERS, 1996, 68 (10) : 1386 - 1388
  • [5] AlGaN/GaN heterojunction bipolar transistors grown by metal organic chemical vapour deposition
    Shelton, BS
    Huang, JJ
    Lambert, DJH
    Zhu, TG
    Wong, MM
    Eiting, CJ
    Kwon, HK
    Feng, M
    Dupuis, RD
    [J]. ELECTRONICS LETTERS, 2000, 36 (01) : 80 - 81
  • [6] Growth of AlGaN nanowires by metalorganic chemical vapor deposition
    Su, J
    Gherasimova, M
    Cui, G
    Tsukamoto, H
    Han, J
    Onuma, T
    Kurimoto, M
    Chichibu, SF
    Broadbridge, C
    He, Y
    Nurmikko, AV
    [J]. APPLIED PHYSICS LETTERS, 2005, 87 (18) : 1 - 3
  • [7] Characterization of AlGaN/GaN heterostructures grown by metalorganic chemical vapor deposition
    Eiting, CJ
    Lambert, DJH
    Kwon, HK
    Shelton, BS
    Wong, MM
    Zhu, TG
    Dupuis, RD
    [J]. PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1999, 216 (01): : 193 - 197
  • [8] Metalorganic chemical vapor deposition of high mobility AlGaN/GaN heterostructures
    Keller, S
    Parish, G
    Fini, PT
    Heikman, S
    Chen, CH
    Zhang, N
    DenBaars, SP
    Mishra, UK
    Wu, YF
    [J]. JOURNAL OF APPLIED PHYSICS, 1999, 86 (10) : 5850 - 5857
  • [9] High current gain graded GaN/InGaN heterojunction bipolar transistors grown on sapphire and SiC substrates by metalorganic chemical vapor deposition
    Chung, T.
    Keogh, D. M.
    Ryou, J. -H.
    Yoo, D.
    Limb, J.
    Lee, W.
    Shen, S. -C.
    Asbeck, P. M.
    Dupuis, R. D.
    [J]. JOURNAL OF CRYSTAL GROWTH, 2007, 298 (852-856) : 852 - 856
  • [10] Study of Mg diffusion during metalorganic chemical vapor deposition of GaN and AlGaN
    Chang, YL
    Ludowise, M
    Lefforge, D
    Perez, B
    [J]. APPLIED PHYSICS LETTERS, 1999, 74 (05) : 688 - 690