[1] Univ Grenoble Alpes, CNRS, CEA, IRIG Spintec,Grenoble INP, F-38000 Grenoble, France
[2] Univ Grenoble Alpes, RFIC Lab, Grenoble, France
[3] Univ Paris Saclay, CNRS, Unite Mixte Phys, Thales, Palaiseau, France
[4] Singulus Technol AG, D-63796 Kahl, Germany
[5] Helmholtz Zentrum Dresden Rossendorf, Inst Ion Beam Phys & Mat Res, D-01328 Dresden, Germany