Structural investigations of sputtered thin films with X-ray absorption techniques

被引：0
|
作者：
Lutzenkirchen-Hecht, D [1 ]
Kramer, A [1 ]
Hammer, H [1 ]
Frahm, R [1 ]
机构：
[1] Univ Dusseldorf, Inst Angew Phys, D-40225 Dusseldorf, Germany
来源：
TRENDS AND NEW APPLICATIONS OF THIN FILMS | 1998年 / 287-2卷
关键词：
EXAFS; sputter deposition; Ag; NbN; atomic short range order;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The extended X-ray absorption fine structure technique (EXAFS) in the reflection mode was used for ex situ investigation of sputter deposited thin films on float glass substrates. We show that a detailed analysis of the reflectivity fine structure data enables the extraction of short range order structural information such as bond distances, coordination numbers and Debye-Waller-factors. The results obtained from the evaluation of the reflectivity data will be compared to those obtained from transmission EXAFS data of the bulk reference materials.
引用
收藏
页码：357 / 360
页数：4
相关论文
共 50 条
  • [1] Structural characterization of polycrystalline thin films by X-ray diffraction techniques
    Akhilesh Pandey
    Sandeep Dalal
    Shankar Dutta
    Ambesh Dixit
    Journal of Materials Science: Materials in Electronics, 2021, 32 : 1341 - 1368
  • [2] Structural characterization of polycrystalline thin films by X-ray diffraction techniques
    Pandey, Akhilesh
    Dalal, Sandeep
    Dutta, Shankar
    Dixit, Ambesh
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2021, 32 (02) : 1341 - 1368
  • [3] X-ray diffraction investigations of thin gold films
    Mattern, N.
    Riedel, A.
    Weise, G.
    Materials Science Forum, 1994, 166-169 (pt 1) : 287 - 292
  • [4] Soft X-ray absorption study of sputtered tin oxide films
    Gago, R.
    Prucnal, S.
    Azpeitia, J.
    Esteban-Mendoza, D.
    Jimenez, I
    JOURNAL OF ALLOYS AND COMPOUNDS, 2022, 902
  • [5] SOFT X-RAY ABSORPTION BY THIN FILMS OF CHROMIUM
    AGARWAL, BK
    GIVENS, MP
    PHYSICAL REVIEW, 1957, 107 (01): : 62 - 64
  • [6] SOFT X-RAY ABSORPTION BY THIN FILMS OF VANADIUM
    AGARWAL, BK
    GIVENS, MP
    PHYSICAL REVIEW, 1957, 108 (03): : 658 - 659
  • [7] MONOCHROMATIC X-RAY DIFFRACTION TECHNIQUES FOR EXAMINING STRUCTURAL CHARACTERISTICS OF POLYCRYSTALLINE THIN FILMS
    DEBEN, HS
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (08) : C212 - &
  • [8] Electron and x-ray diffraction investigations of thin chromium films
    Norenberg, H., 1600, (198): : 1 - 2
  • [9] Extended X-ray Absorption Fine Structure and X-ray Diffraction Examination of Sputtered Nickel Carbon Binary Thin Films for Fuel Cell Applications
    Ingham, Bridget
    Gaston, Nicola
    Fahy, Kieran
    Chin, Xiao Yao
    Dotzler, Christian J.
    Rees, Eric
    Haslam, Gareth
    Barber, Zoe H.
    Burstein, G. Timothy
    Ryan, Mary P.
    JOURNAL OF PHYSICAL CHEMISTRY C, 2012, 116 (10): : 6159 - 6165
  • [10] Structural investigations of GaN films with X-ray standing waves
    Siebert, Michael
    Schmidt, Thomas
    Flege, Jan Ingo
    Einfeldt, Sven
    Figge, Stephan
    Hommel, Detlef
    Falta, Jens
    PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 3, NO 6, 2006, 3 (06): : 1729 - 1732
12345