The Dresden EBIT: An ion source for materials research and technological applications of low-energy highly charged ions

被引：10

作者：

Werner, T

Zschornack, G

Grossmann, F

Ovsyannikov, VP

Ullmann, F

机构：

[1] Tech Univ Dresden, Inst Kern & Teilchenphys, D-01069 Dresden, Germany

[2] LEYBOLD Syst & Serv GmbH Dresden, D-01109 Dresden, Germany

[3] Joint Inst Nucl Res, LHE, Dubna, Russia

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2001年 / 178卷

关键词：

highly charged ions; electron beam ion trap; X-ray spectroscopy; ion extraction; technological applications;

D O I：

10.1016/S0168-583X(01)00515-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We report on a room temperature electron beam ion trap (DEBIT: Dresden EBIT). The construction of the DEBIT allows it to produce dense electron beams with current densities of at least 500 A cm(-2) and an ionization factor of 5 x 10(21) cm(-2) for electron beam energies up to 15 keV. Ions like Fe26+. Kr34+. Xe49+ and Hg70+ have been detected by X-ray spectrometry. The developed device has a high potential for investigations in nanomechanics. potential sputtering, information technology, ion beam lithography, etc., as it was demonstrated by different authors in studies utilizing a cryogenic EBIT or ECR ion sources. To enable adequate investigations a first compact ion extraction system for the DEBIT is described. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：260 / 264

页数：5

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