The Dresden EBIT: An ion source for materials research and technological applications of low-energy highly charged ions

被引：10

作者：

Werner, T

Zschornack, G

Grossmann, F

Ovsyannikov, VP

Ullmann, F

机构：

[1] Tech Univ Dresden, Inst Kern & Teilchenphys, D-01069 Dresden, Germany

[2] LEYBOLD Syst & Serv GmbH Dresden, D-01109 Dresden, Germany

[3] Joint Inst Nucl Res, LHE, Dubna, Russia

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2001年 / 178卷

关键词：

highly charged ions; electron beam ion trap; X-ray spectroscopy; ion extraction; technological applications;

D O I：

10.1016/S0168-583X(01)00515-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We report on a room temperature electron beam ion trap (DEBIT: Dresden EBIT). The construction of the DEBIT allows it to produce dense electron beams with current densities of at least 500 A cm(-2) and an ionization factor of 5 x 10(21) cm(-2) for electron beam energies up to 15 keV. Ions like Fe26+. Kr34+. Xe49+ and Hg70+ have been detected by X-ray spectrometry. The developed device has a high potential for investigations in nanomechanics. potential sputtering, information technology, ion beam lithography, etc., as it was demonstrated by different authors in studies utilizing a cryogenic EBIT or ECR ion sources. To enable adequate investigations a first compact ion extraction system for the DEBIT is described. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：260 / 264

页数：5

共 50 条

[21] Fragmentation of amino acids induced by collisions with low-energy highly charged ions
Piekarski, D. G.
Maclot, S.
Domaracka, A.
Adoui, L.
Alcami, M.
Rousseau, P.
Diaz-Tendero, S.
Huber, B. A.
Martin, F.
XXVIII INTERNATIONAL CONFERENCE ON PHOTONIC, ELECTRONIC AND ATOMIC COLLISIONS (ICPEAC), 2014, 488
[22] EUV spectroscopy of highly charged ions with high- and low-energy EBITs
Yatsurugi, Junji
Watanabe, Etsushi
Ohashi, Hayato
Sakaue, Hiroyuki A.
Nakamura, Nobuyuki
PHYSICA SCRIPTA, 2011, T144
[23] A low-energy compact Shanghai-Wuhan electron beam ion trap for extraction of highly charged ions
Liang, Shiyong
Lu, Qifeng
Wang, Xincheng
Yang, Yang
Yao, Ke
Shen, Yang
Wei, Baoren
Xiao, Jun
Chen, Shaolong
Zhou, Pengpeng
Sun, Wei
Zhang, Yonghui
Huang, Yao
Guan, Hua
Tong, Xin
Li, Chengbin
Zou, Yaming
Shi, Tingyun
Gao, Kelin
REVIEW OF SCIENTIFIC INSTRUMENTS, 2019, 90 (09):
[24] Fragmentation and desorption in low-energy highly charged ion collisions with molecules and surfaces
Motohashi, K.
14TH INTERNATIONAL CONFERENCE ON THE PHYSICS OF HIGHLY CHARGED IONS (HCI 2008), 2009, 163
[25] Laser ion source torch for highly charged ions
Demyanov, AV
Sidorov, SV
Avdeev, SA
Jatcenko, BP
REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (02): : 1156 - 1157
[26] APPLICATIONS OF A KAUFMAN ION-SOURCE TO LOW-ENERGY ION EROSION STUDIES
SHARP, DJ
PANITZ, JKG
MATTOX, DM
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1879 - 1882
[27] Electron-ion interactions and spectroscopy of highly charged ions studied using the Tokyo EBIT
Currell, EJ
Kato, D
Nakamura, N
Ohtani, S
Sokell, EJ
Watanabe, H
Yamada, C
PHYSICA SCRIPTA, 1999, T80A : 154 - 157
[28] A 14.6-GHZ ECR ION-SOURCE FOR ATOMIC PHYSICS AND MATERIALS RESEARCH WITH HIGHLY CHARGED SLOW IONS
ZSCHORNACK, G
BIRKE, U
HOFMANN, D
MUHLE, C
MUSIOL, G
SCHMIDTBOCKING, H
SCHNEIDER, M
STIEBING, KE
STREITZ, H
ZIPPE, C
REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (05): : 3078 - 3083
[29] Stability of multiply-charged biomolecular clusters formed upon interaction with low-energy highly charged ions
Vizcaino, V.
Poully, J. -C.
Chesnel, J. -Y.
Domaracka, A.
Maclot, S.
Mery, A.
Rangama, J.
Rousseau, P.
Adoui, L.
Huber, B. A.
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY, 2014, 365 : 181 - 186
[30] LOW-ENERGY COMPONENTS OF IONS EXTRACTED FROM AN RF ION-SOURCE
ISHIKAWA, I
IINO, T
SUGANOMATA, S
JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (05) : 937 - 943

← 1 2 3 4 5 →