Tribological characterization of chemical vapor deposited Co and Co3O4 thin films for sensing reliability in engineering applications

被引：9
|
作者：
Koumoulos, Elias P. [1 ]
Markakis, Vassileios [1 ]
Tsikourkitoudi, Vasiliki P. [1 ]
Charitidis, Costas A. [1 ]
Papadopoulos, Nikolaos [2 ]
Hristoforou, Evangelos [2 ]
机构：
[1] Natl Tech Univ Athens, Sch Chem Engn, Athens 15780, Greece
[2] Natl Tech Univ Athens, Sch Min Engn & Met, GR-15780 Athens, Greece
来源：
TRIBOLOGY INTERNATIONAL | 2015年 / 82卷
关键词：
Cobalt oxide; Thin films; Nanoindentation; Coefficient of friction; MECHANICAL CHARACTERIZATION; CANDIDATE MATERIALS; GROWTH;
D O I：
10.1016/j.triboint.2014.09.018
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
In the present study, nanoindentation and nanoscratch techniques are applied in order to obtain the nanomechanical properties (hardness, H, and elastic modulus, E) of chemical vapor deposited Co and Co3O4 thin films (promising candidates for magnetic sensing and data storage applications) and evaluate the functionality of the thin film-substrate system. A wear analysis is also performed based on the H/E ratio. (C) 2014 Elsevier Ltd. All rights reserved.
引用
收藏
页码：89 / 94
页数：6
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