Probing systems for micro and nano metrology

被引：2
|
作者：
Hoffmann, Joerg [1 ]
机构：
[1] Univ Erlangen Nurnberg, Lehrstuhl QFM, D-91052 Erlangen, Germany
来源：
TM-TECHNISCHES MESSEN | 2008年 / 75卷 / 05期
关键词：
geometrical micro and nano metrology; probing; multisensor systems;
D O I：
10.1524/teme.2008.0873
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The detection of the surface of a specimen, or selected points on it with the help of probing systems is fundamental for each dimensional measurement. Especially in the field of micro and nano metrology a universal probing system capable for at least a number of different measurement tasks is lacking. Systems based on optical, tactile, electrical, and other interactions with the surface to be probed are available today. The article gives an overview about the state of the art and challenges in nanometer-resolved surface detection.
引用
收藏
页码：311 / 317
页数：7
相关论文
共 50 条
  • [21] Scanning Probe Metrology: From the Metrological SFM to the Micro/Nano CMM
    Dai, Gaoliang
    Buetefisch, Sebastian
    Pohlenz, Frank
    Danzebrink, Hans-Ulrich
    Koenders, Ludger
    [J]. TM-TECHNISCHES MESSEN, 2009, 76 (02) : 43 - 53
  • [22] Sensoric Micro and Nano Systems
    Zahn, Dietrich R. T.
    Schulz, Stefan E.
    Hiller, Karla
    Wagner, Christian
    Reuter, Danny
    Otto, Thomas
    Gessner, Thomas
    [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2019, 216 (19):
  • [23] Micro and Nano Chemical Systems
    Yamamoto, Tatsuhiro
    Kazoe, Yutaka
    Mawatari, Kazuma
    Kitamori, Takehiko
    [J]. JOURNAL OF SYNTHETIC ORGANIC CHEMISTRY JAPAN, 2011, 69 (05) : 526 - 533
  • [24] Nano/micro fluidic systems
    Tseng, FG
    [J]. NANOMECHANICS OF MATERIALS AND STRUCTURES, 2006, : 109 - 119
  • [25] Design and Fabrication of a Micro-capacitor for Nano Probing System
    He, Ming Xuan
    Lu, Xin
    Chen, Xin
    Ling, Xing
    Li, Yuan
    Wang, Hong
    Ding, Gui Fu
    [J]. VIBRATION, STRUCTURAL ENGINEERING AND MEASUREMENT I, PTS 1-3, 2012, 105-107 : 2255 - +
  • [26] NEW PARALLELOGRAM 3D-DISPLACEMENT SENSOR FOR MICRO PROBING AND DIMENSIONAL METROLOGY
    Metz, David
    Dietzel, Andreas
    [J]. 2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2017, : 982 - 985
  • [27] Foreword to the Special Issue on Micro- and Nano-Metrology in Japan (I)
    Shimizu, Yuki
    Mizutani, Yasuhiro
    Michihata, Masaki
    [J]. Nanomanufacturing and Metrology, 2021, 4 (01) : 1 - 2
  • [28] Foreword to the Special Issue on Micro- and Nano-Metrology in Japan (II)
    Shimizu, Yuki
    Mizutani, Yasuhiro
    Michihata, Masaki
    [J]. Nanomanufacturing and Metrology, 2021, 4 (02) : 67 - 68
  • [29] Micro-and nano-scale manufacturing development through precision metrology
    Durakbasa, Numan M.
    [J]. TQM Journal, 2016, 28 (05): : 685 - 703
  • [30] Micro/Nano Devices and Systems Preface
    Beigelbeck, Roman
    Jakoby, Bernhard
    [J]. MICROELECTRONIC ENGINEERING, 2017, 174 : A1 - A1
12345