Scanning Probe Metrology: From the Metrological SFM to the Micro/Nano CMM

被引：6
|
作者：
Dai, Gaoliang [1 ]
Buetefisch, Sebastian
Pohlenz, Frank
Danzebrink, Hans-Ulrich
Koenders, Ludger
机构：
[1] Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany
来源：
TM-TECHNISCHES MESSEN | 2009年 / 76卷 / 02期
关键词：
Nano and micro metrology; scanning probe microscopy; coordinate measuring machine; 3D probe;
D O I：
10.1524/teme.2009.0921
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A coordinate measuring machine (CMM) based on a nano positioning and measuring machine (NMM) has been built up for satisfying various demands on micro and nanoscale dimensional metrology. During the past years two kinds of tactile micro/nano CMM probes have been developed and coupled to the system. In this paper, the development of the micro/nano CMM will be reported. Detailed information on the design ideas concerning the key components of the CMM (positioning stage, probe, software), methods of probe characterization, and measurement results for a typical test artefact are given.
引用
收藏
页码：43 / 53
页数：11
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