Highly efficient blazed grating with multilayer coating for tender X-ray energies

被引：36

作者：

Senf, F. ^{[1
]}

Bijkerk, F. ^{[2
]}

Eggenstein, F. ^{[1
]}

Gwalt, G. ^{[1
]}

Huang, Q. ^{[3
]}

Kruijs, R. ^{[2
]}

Kutz, O. ^{[4
]}

Lemke, S. ^{[4
]}

Louis, E. ^{[2
]}

Mertin, M. ^{[1
]}

Packe, I. ^{[1
]}

Rudolph, I. ^{[1
]}

Schaefers, F. ^{[1
]}

Siewert, F. ^{[1
]}

Sokolov, A. ^{[1
]}

Sturm, J. M. ^{[2
]}

Waberski, Ch. ^{[4
]}

Wang, Z. ^{[3
]}

Wolf, J. ^{[4
]}

Zeschke, T. ^{[1
]}

Erko, A. ^{[1
]}

机构：

[1] HZB, Inst Nanometer Opt & Technol, Albert Einstein Str 15, D-12489 Berlin, Germany

[2] Univ Twente, XUV Opt Grp, MESA Inst Nanotechnol, NL-7522 ND Enschede, Netherlands

[3] Tongji Univ, Sch Phys Sci & Engn, Key Lab Adv Microstruct Mat MOE, Inst Precis Opt Engn, Shanghai 200092, Peoples R China

[4] HZB, Precis Gratings Dept, Albert Einstein Str 15, D-12489 Berlin, Germany

来源：

OPTICS EXPRESS | 2016年 / 24卷 / 12期

关键词：

DIFFRACTION EFFICIENCY; MONOCHROMATORS; ENHANCEMENT; FILMS;

D O I：

10.1364/OE.24.013220

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

For photon energies of 1 - 5 keV, blazed gratings with multilayer coating are ideally suited for the suppression of stray and higher orders light in grating monochromators. We developed and characterized a blazed 2000 lines/mm grating coated with a 20 period Cr/C- multilayer. The multilayer d-spacing of 7.3 nm has been adapted to the line distance of 500 nm and the blaze angle of 0.84 degrees in order to provide highest efficiency in the photon energy range between 1.5 keV and 3 keV. Efficiency of the multilayer grating as well as the reflectance of a witness multilayer which were coated simultaneously have been measured. An efficiency of 35% was measured at 2 keV while a maximum efficiency of 55% was achieved at 4 keV. In addition, a strong suppression of higher orders was observed which makes blazed multilayer gratings a favorable dispersing element also for the low X-ray energy range. (C)2016 Optical Society of America

引用

页码：13220 / 13230

页数：11

共 50 条

[21] Multilayer supermirror coating for hard X-ray telescope
Tawara, Y
Yamashita, K
Kunieda, H
Haga, K
Akiyama, K
Furuzawa, A
Terashima, Y
Serlemitsos, PJ
MULTILAYER AND GRAZING INCIDENCE X-RAY/EUV OPTICS III, 1996, 2805 : 236 - 243
[22] Combined multilayer-multilayer grating monochromator in soft X-ray region
Cui, H.B.
Liu, W.H.
Gao, C.
He Jishu/Nuclear Techniques, 2001, 24 (07):
[23] On the Tender X-Ray Flat-Field Spectrograph with a Concave VLS Grating
Kolesnikov, A. O.
Shatokhin, A. N.
Vishnyakov, E. A.
Ragozin, E. N.
JOURNAL OF RUSSIAN LASER RESEARCH, 2022, 43 (04) : 467 - 475
[24] 6000 lines/mm blazed grating for a high-resolution x-ray spectrometer
Voronov, D. L.
Park, S.
Gullikson, E. M.
Salmassi, F.
Padmore, H. A.
OPTICS EXPRESS, 2022, 30 (16): : 28783 - 28794
[25] On the Tender X-Ray Flat-Field Spectrograph with a Concave VLS Grating
A. O. Kolesnikov
A. N. Shatokhin
E. A. Vishnyakov
E. N. Ragozin
Journal of Russian Laser Research, 2022, 43 : 467 - 475
[26] X-RAY OPTICS Highly efficient nanoscale X-ray sources
Rolles, Daniel
NATURE PHOTONICS, 2018, 12 (02) : 62 - 63
[27] Experimental performances of implanted lamellar X-ray multilayer grating. Comparison with conventional etched multilayer grating
Trambly, H
Vidal, B
Roux, L
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1998, 418 (2-3): : 482 - 490
[28] Multilayer coating facility for the HEFT hard X-ray telescope
Jensen, CP
Christensen, FE
Chen, H
Smitt, EBW
Ziegler, E
X-RAY OPTICS FOR ASTRONOMY: TELESCOPES, MULTILAYERS, SPECTROMETERS, AND MISSIONS, 2002, 4496 : 104 - 108
[29] X-ray grating interferometry at photon energies over 180 keV
Ruiz-Yaniz, M.
Koch, F.
Zanette, I.
Rack, A.
Meyer, P.
Kunka, D.
Hipp, A.
Mohr, J.
Pfeiffer, F.
APPLIED PHYSICS LETTERS, 2015, 106 (15)
[30] Performance of a flat-field grating spectrometer for tender x-ray emission spectroscopy
Imazono, Takashi
Ukita, Ryuichi
Nishihara, Hiroaki
Sasai, Hiroyuki
Nagano, Tetsuya
APPLIED OPTICS, 2018, 57 (27) : 7770 - 7777

← 1 2 3 4 5 →