6000 lines/mm blazed grating for a high-resolution x-ray spectrometer

被引：4
|
作者：
Voronov, D. L. [1 ]
Park, S. [1 ]
Gullikson, E. M. [1 ]
Salmassi, F. [1 ]
Padmore, H. A. [1 ]
机构：
[1] Lawrence Berkeley Natl Lab, 1 Cyclotron Rd, Berkeley, CA 94720 USA
来源：
OPTICS EXPRESS | 2022年 / 30卷 / 16期
关键词：
MULTILAYER; DEMULTIPLEXER;
D O I：
10.1364/OE.460740
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We have designed and fabricated a high groove density blazed grating for a Resonant Inelastic X-ray Scattering spectrometer for the new Qerlin beamline at the Advanced Light Source (ALS) synchrotron facility. The gratings were fabricated using a set of nanofabrication techniques including e-beam lithography, nanoimprint, plasma etch, and anisotropic wet etching. Two gratings with groove density of 6000 lines/mm and 3000 lines/mm and optimized for operation in the 1st and 2nd negative diffraction order respectively were fabricated and tested. We report on fabrication details and characterization of the gratings at beamline 6.3.2 of the ALS. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
引用
收藏
页码：28783 / 28794
页数：12
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